Characterisation of tungsten nitride layers and their erosion under plasma exposure in NANO-PSI

  1. Alegre, D.
  2. Acsente, T.
  3. Martin-Rojo, A.B.
  4. Oyarzabal, E.
  5. Tabarés, F.L.
  6. Dinescu, G.
  7. De Temmerman, G.
  8. Birjega, R.
  9. Logofatu, C.
  10. Kovac, J.
  11. Mozetic, M.
Revue:
Romanian Reports in Physics

ISSN: 1841-8759 1221-1451

Année de publication: 2015

Volumen: 67

Número: 2

Pages: 532-546

Type: Article