Characterisation of tungsten nitride layers and their erosion under plasma exposure in NANO-PSI
- Alegre, D.
- Acsente, T.
- Martin-Rojo, A.B.
- Oyarzabal, E.
- Tabarés, F.L.
- Dinescu, G.
- De Temmerman, G.
- Birjega, R.
- Logofatu, C.
- Kovac, J.
- Mozetic, M.
ISSN: 1841-8759, 1221-1451
Année de publication: 2015
Volumen: 67
Número: 2
Pages: 532-546
Type: Article