Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma

  1. Hollmann, E.M.
  2. Alegre, D.
  3. Baldwin, M.J.
  4. Chrobak, C.P.
  5. Doerner, R.P.
  6. Miyamoto, M.
  7. Nishijima, D.
Zeitschrift:
Journal of Applied Physics

ISSN: 1089-7550 0021-8979

Datum der Publikation: 2017

Ausgabe: 122

Nummer: 11

Art: Artikel

DOI: 10.1063/1.5002114 GOOGLE SCHOLAR