Synthesis of smooth amorphous thin films of silicon carbide with controlled properties through pulsed laser deposition

  1. Oujja, M.
  2. Tabakkouht, K.
  3. Sanz, M.
  4. Rebollar, E.
  5. Sánchez-Arenillas, M.
  6. Marco, J.F.
  7. Castillejo, M.
  8. de Nalda, R.
Revista:
Applied Physics A: Materials Science and Processing

ISSN: 1432-0630 0947-8396

Any de publicació: 2022

Volum: 128

Número: 5

Tipus: Article

DOI: 10.1007/S00339-022-05499-9 GOOGLE SCHOLAR lock_openAccés obert editor