Synthesis of smooth amorphous thin films of silicon carbide with controlled properties through pulsed laser deposition

  1. Oujja, M.
  2. Tabakkouht, K.
  3. Sanz, M.
  4. Rebollar, E.
  5. Sánchez-Arenillas, M.
  6. Marco, J.F.
  7. Castillejo, M.
  8. de Nalda, R.
Journal:
Applied Physics A: Materials Science and Processing

ISSN: 1432-0630,  0947-8396

Year of publication: 2022

Volume: 128

Issue: 5

Type: Article

DOI: 10.1007/S00339-022-05499-9 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus