The assessment of micro-analytical techniques to the semiconductor manufacturing environment

  1. Corbacho, J.L.
  2. Urquia, A.
  3. Fernández, A.
  4. Sanchez, G.
  5. Recio, M.
  6. Martin, V.
  7. Barbado, F.
  8. Morilla, C.
  9. Riloba, A.
  10. De la Hoz, J.
Book Series:
Solid State Phenomena

ISSN: 1012-0394

Year of publication: 1998

Volume: 63-64

Pages: 383-394

Type: Article

DOI: 10.4028/WWW.SCIENTIFIC.NET/SSP.63-64.383 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus