The assessment of micro-analytical techniques to the semiconductor manufacturing environment

  1. Corbacho, J.L.
  2. Urquia, A.
  3. Fernández, A.
  4. Sanchez, G.
  5. Recio, M.
  6. Martin, V.
  7. Barbado, F.
  8. Morilla, C.
  9. Riloba, A.
  10. De la Hoz, J.
Liburu bilduma:
Solid State Phenomena

ISSN: 1012-0394

Argitalpen urtea: 1998

Alea: 63-64

Orrialdeak: 383-394

Mota: Artikulua

DOI: 10.4028/WWW.SCIENTIFIC.NET/SSP.63-64.383 GOOGLE SCHOLAR
Datuen iturria: Scopus