The assessment of micro-analytical techniques to the semiconductor manufacturing environment

  1. Corbacho, J.L.
  2. Urquia, A.
  3. Fernández, A.
  4. Sanchez, G.
  5. Recio, M.
  6. Martin, V.
  7. Barbado, F.
  8. Morilla, C.
  9. Riloba, A.
  10. De la Hoz, J.
Collection de livres:
Solid State Phenomena

ISSN: 1012-0394

Année de publication: 1998

Volumen: 63-64

Pages: 383-394

Type: Article

DOI: 10.4028/WWW.SCIENTIFIC.NET/SSP.63-64.383 GOOGLE SCHOLAR
La source de données: Scopus